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Fabrication and Surface Treatment of Silicon Mold for Imprint Lithography
Fabrication and Surface Treatment of Silicon Mold for Imprint Lithography
- 제목
- Fabrication and Surface Treatment of Silicon Mold for Imprint Lithography
- 제목 (타언어)
- Fabrication and Surface Treatment of Silicon Mold for Imprint Lithography
- 저자
- O BEOM HOAN
- 학회명
- 2004 International Conference on Metallurgical Coatings and Thin Films