Energy storage density improvement of K0.5Na0.5NbO3-0.14SZO3 thick film fabricating by aerosol deposition

초록

With the development of the electric devices industry, the demand for a ceramic based capacitor with a high energy storage density has increased. The energy storage devices with a thermal stability and a high efficiency have been required because the capacity of devices are sensitive to heat. PZT (PbZr0.52Ti0.48O3) is a ferroelectric with a perovskite structure and has been widely used up to now due to its high dielectric properties and thermal stability. However, there are regulations on the use of lead due to environmental problems. Thus, it is necessary to find an environmentally friendly and excellent lead-free ferroelectric material to replace PZT. K0.5Na0.5NbO3-0.14SZO3 is a material that has recently attracted a lot of attention because of its high thermal stability and energy storage density. In this study, the aerosol deposition method (AD method) was performed by fabricating the K0.5Na0.5NbO3-0.14SZO3. The AD method has the advantage of depositing ceramic particles at room temperature by applying a heavy collision force to collide them on the substrate and making nano-grain films. KNN-SZ film was fabricated using the AD method characteristics, and higher energy storage density and thermal stability were observed than in bulk.