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초록
This paper presents the efficient adaptive mesh generator developed for our three-dimensional process simulation in INPROS system. The mesh generator adopted the tetrahedralization for our mesh refinement and elimination algorithm to maximize the efficiency together with minimum calculation error. The island structure was employed to verify the adaptiveness and efficiency of the developed 3-D INPROS system.
- 제목
- 3-D Adaptive Simulation of Thermal Oxidation Process
- 제목 (타언어)
- 열산화 공정의 3차원 적응 시뮬레이션
- 저자
- WON TAEYOUNG
- 학회명
- Proceedings of the 26th European Solid State Device Research Conference (ESSDERC'96)