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초록
The new method based on restricting the scanning range was proposed for a fiber-optical confocal scanning interference microscope to measure a surface profile, and was experimentally certified for even the microscope with a broad axial response curve
- 제목
- Surface Profiling with Fiber-Optical Confocal Scanning Interference Microscope
- 제목 (타언어)
- 주사범위의 제한하는 광섬유 공초점 주사 간섭 현미경을 이용한 표면 검색
- 저자
- LEE SEUNG GOL
- 학회명
- CLEO/Pacific Rim `99