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Fabrication of microstructures by deep RIE etched Si master and PDMS mold

Fabrication of microstructures by deep RIE etched Si master and PDMS mold
  • PARK SEGEUN
제목
Fabrication of microstructures by deep RIE etched Si master and PDMS mold
제목 (타언어)
Fabrication of microstructures by deep RIE etched Si master and PDMS mold
저자
PARK SEGEUN
학회명
제13회 한국반도체 학술대회

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