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Kinetic Monte Carlo Study on Boron Diffusion with Carbon Pre-implant posterior to Amorphization Process

  • WON TAEYOUNG
제목
Kinetic Monte Carlo Study on Boron Diffusion with Carbon Pre-implant posterior to Amorphization Process
저자
WON TAEYOUNG
학회명
30th International Conference on the Physics of Semiconductors
개최지
Hall B2, COEX, Seoul, Korea
학회 개최일
2010-07-25 ~ 2010-07-30

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