Precision and ultra-precision machining with elastic polishing tools: a review

초록

Elastic tool polishing, a flexible and compliant technique, is renowned for its exceptional shape adaptability and minimal surface damage, making it indispensable in industries such as optical and semiconductor manufacturing, where high-precision components of hard and brittle materials are required. Compared to rigid tools or fluid-based polishing methods, elastic tool polishing excels in handling complex geometries and achieving superior surface quality through deterministic machining processes. The primary innovation of this review lies in the comprehensive classification of elastic polishing tools into three categories: elastic, semi-elastic, and semi-rigid. The primary innovation of this review is the comprehensive classification of elastic polishing tools into three categories: elastic, semi-elastic, and semi-rigid. This classification provides a clear framework for understanding the advantages, limitations, and practical applications of each tool type. The review examines each category in terms of process specifications, tool design, and material removal mechanisms. It also evaluates the elastic polishing tools currently available in both laboratory and commercial markets, with a focus on their shape adaptability, polishing efficiency, and resulting surface quality. Recommendations for selecting appropriate elastic tools for specific industrial applications are provided. Finally, the review highlights future research directions, focusing on innovations in tool design, real-time wear monitoring, and the development of environmentally sustainable polishing techniques.

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