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초록
The number of grain is determined based on Posson distribution in respectively different active channel and it is converted to grain size which affects to the mobility and threshold voltage. the acquired data is applied to the SPICE for observing the variation I-V characteristic with several channel lengths. we can confirm the effect on device.
- 제목
- 다결정 실리콘 TFT소자의 채널길이 변화에 따른 grain의 분포와 전기적 특성
- 제목 (타언어)
- Grain distibution and electrical property according to grain size variation in poiysilicon TFTs
- 저자
- LEE SEUNG GOL
- 학회명
- 한국전기전자재료학회 2003년도 추계학술대회