Kinetic Monte Carlo (KMC) Study on Boron Diffusion in Biaxial Strained Silicon

Kinetic Monte Carlo (KMC) Study on Boron Diffusion in Biaxial Strained Silicon
  • WON TAEYOUNG
제목
Kinetic Monte Carlo (KMC) Study on Boron Diffusion in Biaxial Strained Silicon
제목 (타언어)
Kinetic Monte Carlo (KMC) Study on Boron Diffusion in Biaxial Strained Silicon
저자
WON TAEYOUNG
학회명
제14회 한국반도체학술대회