Synthesis of TiO2 nanotubes arrays using atomic layer deposition and anodic oxdie template and their photoluminescence properties

초록

TiO2 nanotubes with different wall thicknesses were prepared by using a template technique and the influence of the wall thickness on the luminescence properties were examined. Self-aligned TiO2 nanotube arrays can be fabricated by atomic layer deposition (ALD) and anodic oxide template (AAO) on Si or quartz substrates. In particular, the wall thickness of the nanotubes can be controlled precisely using ALD technique. With decreasing the wall thickness of TiO2 nanotube arrays, photoluminescence (PL) intensity was found to increase. Compared TiO2 thin film with TiO2 nanotube arrays, TiO2 nanotube arrays exhibited a better perfonnance on PL characteristic due to larger surface area. Owing to larger amount of oxygen vacancies on the surface, compared with the volume factor, surface area was a more important factor that affected the perfonnance of PL characteristics.