Fault Detection Prediction Using a Deep Belief Network-Based Multi-Classifier in the Semiconductor Manufacturing Process

초록

The semiconductor manufacturing process is very complex, and it is the most important part of the semiconductor industry. In order to test whether or not wafers are functioning normally, a pass/fail test is conducted; however, time and cost needed for this testing increase as the number of chips increases. To address this, a machine learning technique is adopted and a high-performance classifier is needed to determine whether a pass/fail test is accurate or not. In this paper, a deep belief network (DBN)-based multi-classifier is proposed for fault detection prediction in the semiconductor manufacturing process. The proposed method consists of two phases: The first phase is a data pre-processing phase in which features required for semiconductor data sets are extracted and the imbalance problem is solved. The second phase is to configure the multi-DBN using selected features. A DBN classifier is created for each feature and, finally, fault detection prediction is performed. The proposed method showed excellent performance and can be used in the semiconductor manufacturing process efficiently.

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