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Robust High-G Microaccelerometers with Mechanical Low-Pass Filters and Electrical ROIC
- Choi, Yebin;
- Seok, Minho;
- Cheon, Song-I;
- Je, Minkyu;
- Cho, Young-Ho;
- ... Yoon, Sang-Hee;
- 외 6명
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0초록
This paper presents a shock measurement unit (SMU) composed of a cross-symmetric accelerometer core chip, a mechanical low-pass filter, and an electrical read-out integrated circuit (ROIC). The SMU shows a cross-axis sensitivity of less than 1%, a shock endurance as high as 150 kG, and highfrequency shock protection over 100 kHz, demonstrating a high survivability in extreme impact environments.
키워드
high-G shock measurement unit (SMU); cross-symmetric accelerometer core chip; mechanical low-pass filter; electrical saturation-free ROIC; PIEZORESISTIVE ACCELEROMETER
- 제목
- Robust High-G Microaccelerometers with Mechanical Low-Pass Filters and Electrical ROIC
- 저자
- Choi, Yebin; Seok, Minho; Cheon, Song-I; Je, Minkyu; Cho, Young-Ho; Song, Sehwan; Yoon, Sang-Hee; Kim, Kilyug; Uhm, Won-Young; Jang, Junyong; Cho, Yongjun; Jung, Myung-Suk
- 발행일
- 2024
- 유형
- Proceedings Paper
- 저널명
- International Symposium on Inertial Sensors and Systems, ISISS
- 언어
- ENG
- 출판사
- Institute of Electrical and Electronics Engineers Inc.
- ISSN
- E 2377-3480
P 2377-3464