Sol-gel 법에 의한 ZnO 박막의 광학적 특성 연구

초록

ZnO thin films were prepared by sol-gel spin-coating method and optical properties of films were investigated. As a starting material, Zinc acetate dihydrate was used. 2-methoxyethanol and MEA were used as the solvent and stabilizer, respectively. ZnO films were obtained by drying the films at 300℃ for 10 min after each coating and annealing at 600℃ for 30 min. The optical properties of ZnO thin films were obtained by photoluminesence (PL) and structural properties of ZnO thin films were obtained by XRD. According to XRD (002) textured ZnO thin films of high crystalline quality have been obtainde and Intensity of photoluminescesce (PL) was the highest at 600℃ annealing temperature.