질화알루미늄 초미립자의 제조를 위한 열플라즈마공정의 개발

초록

Thermal plasma process for preparing ultrafine aluminum nitride has been studied. Aluminum were vaporized in DC plasma jet flame using Ar+N2 mixing gas as plasma forming gas. Ultrafine powder of aluminum nitride were prepared by reaction of Al vapor with ammonia gas. It was observed that the conversion into AlN was mainly affected by the degree of vaporization and reactor configuration. The conversion into AlN increase with injection of NH3 gas. The powder was observed as white in color and the size was measured to be from 20nm to 300nm.