MEMS 감지기 및 작동기 박막의 기계적 특성연구

초록

Mechanical characteristics of stainless steel have been studied as a diaphragm and a substrate material for the MEMS devices. In the study, a fabrication process for stainless steel micro machined devices keeps the membrane and substrate being at the environment of 8.65 MPa pressure and 175℃ for a half hour and then subsequently cooled to 25℃. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm.