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초록
Optical and structural properties of TiO2 and MgF2 thin films deposited by plasma ionassisted deposition were investigated and the effects of plasma ion-assistance and substrate heating were studied to deposit the stable TiO2/MgF2 multilayers.
- 제목
- Plasma ion-assisted deposition of TiO2 and MgF2 thin film
- 저자
- CHANG KWON HWANGBO
- 학회명
- Optical Interference Coatings Conference by the Optical Society of America