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Fabrication and Characterization of SiOC Low-k Dielectric ThinFilm Using Solution Process

  • KIM HYUNG SUN
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Fabrication and Characterization of SiOC Low-k Dielectric ThinFilm Using Solution Process
저자
KIM HYUNG SUN
학회명
2009 한국세라믹학회(추계)
개최지
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