간섭무늬 신호 처리 및 점 노이즈 처리를 통한 백색광 간섭계의 성능 향상

초록

In this paper, we measured the array of micro metal solder balls using white-light interferometry(WLI). The limited NA of the illumination optics have a considerable impact on the interference fringe. Therefore, we propose a preprocessing method that using the intensity difference between the measured intensity and the moving average intensity. and after envelope detection processing at each pixel, we filter out the point noise using comparative mean filter. The proposed method is reduced the noise pixels by 4.4 percent.