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Influence of Nitrogen Substitution on Plasma Etching Characteristics of Y-Si-Al-O-N Oxynitride Glasses

  • KIM HYUNG SUN
제목
Influence of Nitrogen Substitution on Plasma Etching Characteristics of Y-Si-Al-O-N Oxynitride Glasses
저자
KIM HYUNG SUN
학회명
The 25th International Korea-Japan Seminar on Ceramics
개최지
강릉
학회 개최일
2008-11-19 ~ 2008-11-21

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