Preparation and Characterization of Environment Friendly Various Pattern Film via UV Imprint Lithography Process

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초록

During the imprint lithography process (ILP), ILP technology using ultraviolet (UV) light is the method of pressing UV curing resins at a constant pressure (low pressure) with mold fabricated using pattern master, then UV irradiation, hardening resins, and then pulling away and transcription. This method is simpler and more efficient than the thermal ILP technology, which requires high temperature and high pressure. Thus, in this study, the UV-ILP for various pattern formulation was conducted, and the UV curing resin developed was used with environment-friendly acrylic resin. The resin does not contain fluorine, making it difficult to develop hydrophobic properties. Thus, by different mold surface patterns through the imprint process, acrylic resin also showed the super-hydrophobic surface characteristics. To evaluate the physical characteristics of UV curing resins developed, the surface properties, hardness, contact angle, and thermal characteristics were conducted. In conclusion, water-contact angle of honeycomb pattern film has shown the super-hydrophobic property over than 120 degree compared to the flat type pattern film.

키워드

imprint lithographyUV curing resinacrylic resinenvironment friendlyhydrophobicFREE SUPERHYDROPHOBIC COATINGSPERFLUORINATED ACIDSPERFLUOROALKYL ACIDSSLIPPERY SURFACESWETTABILITYFABRICATION
제목
Preparation and Characterization of Environment Friendly Various Pattern Film via UV Imprint Lithography Process
저자
Jeong, Min-HuiYouk, Ji-HoLee, Seung-Jun
DOI
10.7317/pk.2020.44.4.527
발행일
2020-07
유형
Article
저널명
폴리머
44
4
페이지
527 ~ 534