초경합금 기판 위에 성장된 다이아몬드 박막의 내마모 특성

초록

We prepared diamond thin films on WC-Co substrate in a mixtured H2-CH4-O2 gas, using 13.56MHz RF PACVD. Scanning electron microscopy, X-ray diffraction and Raman spectroscopy were used to analyze the characteristics of thin film, and tribometer of ball-on-disk type were used to test the wear resistance between thin film and substrate. The good diamond quality and wear resistance was appeared with cemented tungsten carbide substrate treated with oxygen plasma.