The etching characteristics of the PDP barrier rib pastes by focused Ar+ laser and Nd:YAG laser

초록

The paste dried and hardened on glass substrate for fabrication of the PDP(Plasma Display Panel) barrier rib was selectively etched using focused Ar+ laser( =514 nm)and Nd:YAG laser( =266, 532 nm) beam. A barrier rib was composed of mixtures which were made from organic gel, glass powder and ceramic powder. Using a second harmonic Nd:YAG laser ( =532 nm), the threshold laser fluence was about 6.5 mJ/cm2 for the barrier rib samples softened at 120 C. The thickness of 180 m of the sample was completely removed without any damages on the glass substrate by laser fluence of 19.5 J/cm2. In order to increase the etch rate of the barrier rib materials, samples were heated on a hot plate during the laser irradiation. The etch rate at the hot plate temperature of 200 C was roughly 4.2 times faster than that of room temperature.