Atomistic Modeling for Understanding the Suppression of Boron Diffusion in Ge Pre-amorphized Silicon Substrate

  • WON TAEYOUNG
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Atomistic Modeling for Understanding the Suppression of Boron Diffusion in Ge Pre-amorphized Silicon Substrate
저자
WON TAEYOUNG
학회명
Micro-and Nano-Engineering 2006 32nd International Conference