Enhancing Breakdown Strength and Energy Storage Efficiency of Glass-Pb(Zr,Ti)O3 Composite Film by Aerosol Deposition

초록

To improve ferroelectric properties of PZT, many studies have been attempted to fabricate the dense PZT films. AD process has an advantage for forming dense ceramic films at room temperature without any additional heat treatment in low vacuum. Thick films coated by AD have a higher dielectric breakdown strength due to a higher density than those coated in conventional methods. To improve the breakdown strength, glass (SiO2-Al2O3-Y2O3, SAY) was mixed with PZT powder with various volume ratios (PZT-xSAY, x=0, 5, 10vol%) and coating films were produced on silicon wafers by AD method. Depending on the ratio of PZT and glass, dielectric breakdown strength and energy storage characteristics changed. Mechanical impact in AD process made the SAY glass more viscous to densely fill the film. Compared to the pure PZT film, the PZT-SAY film showed an 87.5% increase in breakdown strength and a 35.3% increase in energy storage efficiency.