Machinability evaluation of Si3N4-hBN composites for micro pattern making processes

초록

. In this study, machinablilty evaluation of Si3N4-hBN composites is performed for micro pattern making processes. First, R-curve behavior of Si3N4-hBN composites is investigated to understand its machinability. And, micro-powder blasting and micro-drilling processes are performed for the machinability evaluation of the composites. In the micro-powder blasting process, the machining effects on the erosion depth of samples using three different mask patterns are analyzed by varying the nozzle scanning times and compositions of h-BN. Also, in the micro-drilling process, small holes are drilled using micro-drilling machine under variable conditions. Finally, machinablity of Si3N4-hBN composites is investigated based on the obtained data.