Low-Temperature Fabrication of Membrane Gate FET using a sacrificial release process for versatile sensor platform

제목
Low-Temperature Fabrication of Membrane Gate FET using a sacrificial release process for versatile sensor platform
저자
RINO CHOI
학회명
NANO KOREA 2019
개최지
KINTEX
학회 개최일
2019-07-02 ~ 2019-07-05