(초청강연논문) Integration of Functional Micro/Nano-Photonic Devices on Polymer Waveguide Circuit Board

초록

This paper presents an overview of our study on the design, fabrication, and integration of various forms of micro/nano-photonic devices, especially with silicon, on the optical printed circuit board (O-PCB) for VLSI photonic integrated circuit applications. The VLSI photonic circuits (VLSI-PICs) are designed to be of generic and application-specific nature. We first design and fabricate O-PCBs of low cost, compact, high-speed, intelligent, light-weight, low-energy and environmentally friendly characteristics, in the form of either hard board or of flexible board, again in the generic and application-specific nature. The O-PCBs carry 2-dimensional planar arrays of micro/nano-scale polymer optical waveguides and wires fabricated by means of thermal or UV imprinting technique. We use scaling rules that we developed for the miniaturization and high-density integration of the polymer micro/nano-waveguides and wires. The micro-scale photonic devices to be integrated on the O-PCBs include the AWGs, directional couplers, MMIs, modulators, micro-ring resonators, gratings, and sensors. Next, for VLSI photonic integrated circuit applications, the imprinted waveguides are used as multiple optical interconnection channels to integrate micro/nano-photonic devices to perform the functions of sensing, storing, transporting, processing, switching, routing and distributing optical signals. The nano-photonic devices to be integrated on the board include light sources, nano-detectors, photonic crystal devices, plasmonic devices, and quantum devices, made of polymer, silicon, semiconductor, and bio-materials. We then integrate a variety of nano-scale functional devices such as directional couplers, multimode interference (MMI) devices, power splitters, wavelength splitters, triplexers, filters, and develop their nano-scale integration and interconnection technology. We use silicon as the basis of the most of our micro/nano-photonic devices and build other functional devices of other