Preparation of Thin Films of Organic-Inorganic Hybrids by Non-Hydrolytic Sol-Gel Processing

초록

A series of novel organic-inorganic hybrid materials by using diol and alkoxysilane were prepared by a non-hydrolytic sol-gel reaction. Various organic diol compounds with functionality were reacted with inorganic precursors of (3-acryloxypropyl)trimethoxysilane in the presence of a catalyst of barium hydroxide monohydrate [Ba(OH)2•H2O]. The amount of diols was changed to 30 mol% and 60 mol% and the concentration of catalyst was fixed at 0.1 mol % of the total inorganic silane compounds. The final mixture is then stirred at 80oC for additional 2 hrs. The mixed solution is transferred into a vacuum at 60 oC to remove the alcohol, a byproduct of the condensation reaction. Thin films of B3, B4, and B5 are obtained from spin-coating on a Si wafer. The films exhibit excellent adhesion with the substrate. The surfaces of the films are flat and smooth. The films contain no crack and displays uniform thickness. The film thickness increases, however, with the relative amount of diol compound. Figure 1 shows the replica of the film of BPA and ATS, prepared with a PDMS stamp through UV embossing, revealing that our materials can be used in the fabrication of various optical waveguides and devices of diverse patterns.