휘발성유기화합물을 이용한 다이아몬드 필름증착

초록

Diamond film was synthesized on molybdenum substrate by chemical reaction of volatile organic compounds and hydrogen gas using the plasma jet at atmospheric pressure. The morphology of the film deposited is (111) faces at 1.5 ml/min of toluene and (100) faces at 1.5 ml/min of dichlorobenzene.......