Sol-Gel법에 의한 강유전체 PZT 박막의 제작

초록

Crack-free and homogeneous compact ceramic and epitaxial lead zirconate titanate(PZT) ferroelectric thin films with perovskite structure have been prepared by sol-gel processing. Ti-isopropoxide and lead acetate trihydrate and zirconium-propoxide are used raw materials. EAcAc is used as a catalyst. Ethylene glycol is used as a solvent. The annealing temperatures of the thin films are 600-900℃.