A Finite Element Analysis for Magnetostrictive Thin Film Structures and Its Experimetal Verification

초록

In this paper, a finite element code especially for micro-magnetostrictive actuators was developed. For verification purpose, manetostrictive thin films were fabricated and tested in the form of a cantilevered actuator. The magnetic and magnetostrictive properties of the sputtered magneto strictive films are measured. The measured magnetostrictive coefficients are compared with the numerically calculated ones.