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Effect of Time-varying Axial Magnetic Field on High Aspect Ratio SiO2 Etching in an Inductively Coupled Plasma
- 제목
- Effect of Time-varying Axial Magnetic Field on High Aspect Ratio SiO2 Etching in an Inductively Coupled Plasma
- 저자
- O BEOM HOAN
- 학회명
- AWAD 2002