졸겔 방법으로 제작된 유기물-무기물 혼합 실리카 유리를 이용한 다중모드 간섭 광분배기의 제작

초록

We report the fabrication and characterization of sol-gel derived silica glass waveguides on either pyrex glass or silicon substrates. The sol-gel process used provides crack-free thick films by a one step dip or spin coating, and makes it possible to precisely select the refractive index from 1.499 to 1.516 at the wavelength of 632.8 nm by controlling the chemical composition of the sol solutions. The MMI power splitters were fabricated with these films and their characteristics were measured.