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Etching effects of differently deposited silicon nitride for silicon photonics

  • LEE SEUNG GOL

초록

We studied plasma etching technique of silicon nirtride layer for silicon photonics devices.

제목
Etching effects of differently deposited silicon nitride for silicon photonics
저자
LEE SEUNG GOL
학회명
The 2nd International Conference on Microelectronics And Plasma technology 2009

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