Effects of oxygen vacancies on ferroelectric characteristics of RF-sputtered Hf0.5Zr0.5O2 (vol 160, 107401, 2023)

  • Han, Changhyeon
  • Kwon, Ki Ryun
  • Kim, Jeonghan
  • Yim, Jiyong
  • Kim, Sangwoo
  • ... Choi, Rino
  • 외 4명
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제목
Effects of oxygen vacancies on ferroelectric characteristics of RF-sputtered Hf0.5Zr0.5O2 (vol 160, 107401, 2023)
저자
Han, ChanghyeonKwon, Ki RyunKim, JeonghanYim, JiyongKim, SangwooPark, Eun ChanYou, Ji WonJeong, SoiChoi, RinoKwon, Daewoong
DOI
10.1016/j.mssp.2023.107465
발행일
2023-06-15
유형
Correction
저널명
Materials Science in Semiconductor Processing
160