Fabrication of grating structures by AFM nano-lithography

  • LEE EL HANG
제목
Fabrication of grating structures by AFM nano-lithography
저자
LEE EL HANG
학회명
35th MNE International Conference on Micor and Nano Engineering
개최지
브류셀
학회 개최일
2009-09-27 ~ 2009-10-01