진공증착중합법에 의해 제조된 6FDA/4-4'DDE 폴리이미드 박막의 열처리 특성에 관한 연구

초록

In this paper polyimide(PI) thin film are fabricated by vapor deposition polymerization(VDP) of dry process which are ease to control the film's thickness and hard to pollute due to volatile solvent. The FT-IR spectrum show that PAA thin films fabricated by VDP are changed to PI thin film by thermal curing. from AFM(atomic Force Microscopy) experimental. as the higher curing temperarture. the thin film thickness decreases and roughness decresse.