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Influence of plasma ion beam assistance on the properties of TiO2 and MgF2 thin films deposited by plasma ion-assisted deposition

  • CHANG KWON HWANGBO
제목
Influence of plasma ion beam assistance on the properties of TiO2 and MgF2 thin films deposited by plasma ion-assisted deposition
저자
CHANG KWON HWANGBO
학회명
International Conference on Surface Modification of Materials by Ion Beam (SMMIB)

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