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Formation of ferroelectric Hf0.5Zr0.5O2 thin film using high pressure anneal

제목
Formation of ferroelectric Hf0.5Zr0.5O2 thin film using high pressure anneal
저자
RINO CHOI
학회명
Nano Convergence Conference 2020
학회 개최일
2020-01-01 ~ 2020-01-03

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