Dependence of the NH3 gas flow rate on the electrical properties of p-type ZnO thin films prepared by atomic layer epitaxy

  • CHONGMU LEE
제목
Dependence of the NH3 gas flow rate on the electrical properties of p-type ZnO thin films prepared by atomic layer epitaxy
저자
CHONGMU LEE
학회명
The 13th International Symposium on the Physics of semiconductors and Applications-2006