Investigation of sodium-potassium niobate (Na0.5K 0.5NbO3) thin film fabrication for piezoelectric sensor application

초록

Piezoelectricity is one major actuating mechanism of cellulose Electro-active paper (EAPap). In order to enhance piezoelectric performance of cellulose, thin piezoelectric sodium-potassium niobate, Na0.5K0.5NbO3(NKN), film on cellulose, silicon and glass substrates was deposited by magnetron sputtering method. As grown NKN layer on different substrates was characterized by XRD, AFM and electrical measurements. By increasing the RF power, crystal structures were observed from the NKN films on silicon and glass substrate, while no peak was observed from cellulose due to microcracks of films. The detail structural and electrical observation was discussed. © 2010 Copyright SPIE - The International Society for Optical Engineering.