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Effect of Electrical Substratae Bias on the Nanostructural and Optical Features of nc-Si:H Films Prepared by PECVD

  • CHO NAMHEE
제목
Effect of Electrical Substratae Bias on the Nanostructural and Optical Features of nc-Si:H Films Prepared by PECVD
저자
CHO NAMHEE
학회명
ICPS2010(30th International Conference on the Physics of Semiconductors)
개최지
KOEX
학회 개최일
2010-07-25 ~ 2010-07-30

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