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Controlling the Silicon Micro-grass in Fabrication of a Deeply Etched Silicon Mold using Adaptive Bosch Process
Controlling the Silicon Micro-grass in Fabrication of a Deeply Etched Silicon Mold using Adaptive Bosch Process
- 제목
- Controlling the Silicon Micro-grass in Fabrication of a Deeply Etched Silicon Mold using Adaptive Bosch Process
- 제목 (타언어)
- Controlling the Silicon Micro-grass in Fabrication of a Deeply Etched Silicon Mold using Adaptive Bosch Process
- 저자
- O BEOM HOAN
- 학회명
- DPS 2005