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초록
We have investigated the influence of dry etching parameters on the smoothness of an optical MEMS mirror and also improved its smoothness by depositing gold thin-film on the surface with a Magnetron DC sputtering. The improvement in the surface roughness of an optical MEMS mirror was confirmed by AFM(Atomic Force Microscopy), and the best roughness was measured to be ~15nm(RMS) for final gold layer.
- 제목
- 마그네트론 DC 스퍼터링에 의한 광소자용 거울면의 표면조도 향상
- 제목 (타언어)
- Enhancement of a surface smoothness for Optical MEMS mirror by Magnetron DC sputtering
- 저자
- LEE EL HANG
- 학회명
- 2002 Photonics Conference