플라즈마 디스플레이 패널을 위한 레이저 직접 패터닝

초록

A mixture which was made from organic gel, glass powder and ceramic powder was masklessly etched for fabrication of barrier rib of PDP(Plasma Display Panel) by focused Ar+ laser(λ=514 ㎚) and Nd:YAG(λ=532, 266 ㎚) laser irradiation at the atmosphere. The depth of the etched grooves increases with increasing a laser fluence and decreasing a scan speed. Using second harmonic of Nd:YAG laser, the threshold laser fluence was 6.5 mJ/㎠ for the sample of PDP barrier rib softened at 120 ℃. The thickness of 130 ㎛ of the sample on the glass was clearly removed without any damage on the glass substrate by fluence of 19.5 J/㎠.