Replication of waveguide devices using hot embossing lithography

초록

We report on the simple fabrication process of hot embossing lithography (HEL) mold using conventional photolithography technique and electroplating. By with the fabricated HEL mold, the 1X2 MMI power splitter could be successfully replicated on the PMMA sheet. The shapes of relicated waveguide device were good agreement with the master pattern.