CCl2F2 가스분위기에서 집속레이저빔을 이용한 페라이트의 미세가공

초록

A single crystal Mn-Zn ferrite was directly etched by focused Ar+ laser beam in CCl2F2 gas atmosphere. AES has been performed for locally investigating the surface composition of an etched layer. MnCl, ZnCl being created after the substrate and CCl2F2 chemically reacting was remained in the vicinity of laser irradiation area because of their low vapor pressure. Various patterns using computer were formed on the substrate. The etched grooves and patterned shapes were observed by SEM measurement.