Surface Acoustic Wave (SAW) device using piezoelectric cellulose EAPap: Fabrication and characterization

초록

Novel smart materials have been suggested for various sensor applications such as chemical sensor, bio sensor, wireless communication, and radio frequency identification (RF-ID) devices. It was reported that bio-compatible and as well as bio-degradable, naturally abundant, and flexible piezoelectric cellulose electro-active paper (EAPap) had a great industrial potential due to its piezoelectricity. Here we studied the feasibility of surface acoustic wave (SAW) devices using thin piezoelectric cellulose EAPap. The single inter-digit transducer (IDT) pattern with 10 μm finger width was designed and fabricated on thin piezoelectric EAPap using lift-off technique. The frequency response to different vapor dose of isopropyl alcohol under will be presented. © 2009 SPIE.