Analysis of Charge Diffusion in Al2O3?Au interlayer structure

초록

Behavior of electrons at Nanoscale device is different from the classical model. In this study, we investigated the electrical behavior of charge trapping device composed of Au nanocluster, alumina, and the silicon substrate. Trapped electrons were injected two shapes such as line and dot with conductive atomic force microscopy (CFM). Injection voltage was +8V and the electric potential of the surface was measured by Scanning Kelvin Probe Microscopy (SKPM). Analyzing remained charges over time, we found that trapped electrons are exponentially decayed.