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Numerical Analysis of Stress Distribution for Thermal Nanoimprint Lithography

  • WON TAEYOUNG
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Numerical Analysis of Stress Distribution for Thermal Nanoimprint Lithography
저자
WON TAEYOUNG
학회명
34th International Conference on Micro and Nano Engineering
학회 개최일
2008-09-15 ~ 2008-09-19

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